The Scanning Electron Microscope (SEM) utilizes a high-energy electron beam to scan the sample surface point-by-point, collecting various signals such as secondary electrons and backscattered electrons for imaging. Compared to traditional optical microscopes, SEM has the following significant characteristics:
High Resolution: Can reach 1�2 nm (depending on the model and electron source).
Large Depth of Field: Capable of presenting more three-dimensional surface topography.
Multifunctional Analysis: Simultaneous acquisition of multiple types of information including morphology, composition, crystal orientation, and local defects.
Wide Sample Adaptability: Conductive or conductively coated solid samples can be observed directly.
With the growing demand for high-resolution detection in fields such as semiconductor processing, micro/nano fabrication, and advanced materials, the need for fine characterization of structure and composition in batteries, electrocatalysts, and fuel cells, and increasing research on biological samples like cells, microorganisms, and nanomedicines, the application scope and market demand for SEM are expanding from scientific research to industry, and from static characterization towards multimodal and in-situ detection.
In line with this trend, the Phytron VSS vacuum stepper motor is widely used in core motion and positioning units within SEMs, including:
Multi-axis drive for the Sample Stage
Positioning of the EDS probe
Deployment/retraction and angle adjustment of backscattered electron detectors or optical probes
Since SEM places extremely high demands on drive systems, stepper motors need to possess the following capabilities:
Compatibility with high vacuum environments
High-precision positioning
Support for drive signals up to 300,000 pulses per second
High repeatability, high torque at low speeds
Ensuring stable, vibration-free micro-displacements
Phytron has been a significant supplier of vacuum stepper motors since introducing its first motor specifically designed for vacuum environments in 1984, building on decades of experience and continuous pursuit of performance. The VSS series two-phase hybrid stepper motors fully meet SEM application requirements:
Can operate in vacuum environments down to 10⁻¹¹ hPa
Holding torque range covers 3.4 mNm to 13 Nm
Step resolution can reach 1/512 in microstepping mode, and can achieve precise positioning when combined with an encoder
Unique magnetic circuit design ensures no stiction effect when the motor holds position, making it particularly suitable for probe and detector positioning
Furthermore, Phytron also offers:
VGPL planetary/harmonic drive gearboxes
KTC/Pt100 thermal sensors
Encoders and dual-shaft options
to meet diverse and customized requirements.
Beijing Handelsen provides automation solutions for customers, including motors for extreme environments like vacuum, standard industrial stepper motors, integrated stepper motors, DC geared motors, explosion-proof motors, and vibration motors. Welcome to inquire.
